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Proceedings Paper

Minimizing interferometer misalignment errors for measurement of subnanometer length changes
Author(s): Rene Schoedel; Arnold Nicolaus; Gerhard Boensch
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Paper Abstract

The detailed knowledge of thermal expansion and dimensional stability of low expansion materials is of growing interest and requires measurements of length changes with sub nm uncertainty. In addition to accurately defined environmental conditions the interferometer adjustment, namely the number of fringes covering the sample and also the method of autocollimation adjustment, become more important. Their influence, investigated with PTB's precision interferometer, will be discussed.

Paper Details

Date Published: 20 November 2003
PDF: 9 pages
Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); doi: 10.1117/12.503677
Show Author Affiliations
Rene Schoedel, Physikalisch-Technische Bundesanstalt (Germany)
Arnold Nicolaus, Physikalisch-Technische Bundesanstalt (Germany)
Gerhard Boensch, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 5190:
Recent Developments in Traceable Dimensional Measurements II
Jennifer E. Decker; Nicholas Brown, Editor(s)

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