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Proceedings Paper

Thermo-optically tunable thin film devices
Author(s): Lawrence H. Domash
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Paper Abstract

We report advances in tunable thin film technology and demonstration of multi-cavity tunable filters. Thin film interference coatings are the most widely used optical technology for telecom filtering, but until recently no tunable versions have been known except for mechanically rotated filters. We describe a new approach to broadly tunable components based on the properties of semiconductor thin films with large thermo-optic coefficients. The technology is based on amorphous silicon deposited by plasma-enhanced chemical vapor deposition (PECVD), a process adapted for telecom applications from its origins in the flat-panel display and solar cell industries. Unlike MEMS devices, tunable thin films can be constructed in sophisticated multi-cavity, multi-layer optical designs.

Paper Details

Date Published: 20 October 2003
PDF: 6 pages
Proc. SPIE 5225, Nano- and Micro-Optics for Information Systems, (20 October 2003); doi: 10.1117/12.503620
Show Author Affiliations
Lawrence H. Domash, Aegis Semiconductor, Inc. (United States)


Published in SPIE Proceedings Vol. 5225:
Nano- and Micro-Optics for Information Systems
Louay A. Eldada, Editor(s)

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