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Proceedings Paper

Grating fabrication through x-ray lithography
Author(s): Pantazis Z. Mouroulis; Frank T. Hartley; Richard E. Muller; Daniel W. Wilson; Aidan Shori; Martin Feldman; Li Jiang; Todd R. Christenson
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Paper Abstract

Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. They can be generated over a considerable depth for use anywhere in the ultraviolet to middle infrared range. They can also be recorded on substrates of considerable curvature.

Paper Details

Date Published: 3 November 2003
PDF: 7 pages
Proc. SPIE 5173, Current Developments in Lens Design and Optical Engineering IV, 51730D (3 November 2003); doi: 10.1117/12.503200
Show Author Affiliations
Pantazis Z. Mouroulis, Jet Propulsion Lab. (United States)
Frank T. Hartley, Jet Propulsion Lab. (United States)
Richard E. Muller, Jet Propulsion Lab. (United States)
Daniel W. Wilson, Jet Propulsion Lab. (United States)
Aidan Shori, Louisiana State Univ. (United States)
Martin Feldman, Louisiana State Univ. (United States)
Li Jiang, Louisiana State Univ. (United States)
Todd R. Christenson, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 5173:
Current Developments in Lens Design and Optical Engineering IV
Pantazis Z. Mouroulis; Warren J. Smith; R. Barry Johnson, Editor(s)

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