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Proceedings Paper

Characteristic energy loss spectra of metal-silicon surface phases
Author(s): Yu. V. Luniakov; Victor G. Lifshits
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Paper Abstract

Energy loss spectra of the ordered and disordered metal-silion surface phases available in literature are collected and analyzed. The ordered surface phases are shown to demonstrate energy loss features that are different from those of the clean metal and silicon. These features can be an indication of the formation of corresponding surface phase. The method of characteristic energy losses can be used for identification of the disordered surface phases that cannot be detected by conversional LEED of RHEED methods. One of the examples is disordered Si(111) √3 × √7-In surface phase that can be detected only by characteristic EELS peak near 13.5 eV.

Paper Details

Date Published: 17 June 2003
PDF: 6 pages
Proc. SPIE 5129, Fundamental Problems of Optoelectronics and Microelectronics, (17 June 2003); doi: 10.1117/12.502392
Show Author Affiliations
Yu. V. Luniakov, Institute for Automation and Control Processes (Russia)
Victor G. Lifshits, Institute for Automation and Control Processes (Russia)


Published in SPIE Proceedings Vol. 5129:
Fundamental Problems of Optoelectronics and Microelectronics
Yuri N. Kulchin; Oleg B. Vitrik, Editor(s)

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