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Proceedings Paper

SiOx (Fe) thin films as material for uncooled microbolometer
Author(s): K. Michailovskaya; Ivan Z. Indutnyy; Peter E. Shepeliavy
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Paper Abstract

Composite metal-dielectric SiOx -Fe- films with concentration of metal varied on thickness in dielectric matrix SiOx are investigated. The reflectance and transmittance of the samples at normal incidence were measured in the 2 - 12 microns wavelength range. In the wavelength range of 2 - 8,5 microns absorption of the films is about 90%, in more long-wavelength area 8,5 - 12 microns absorption is equal 70 - 80%. The optical properties of these gradient layers are simulated, and the results of simulation are compared with experimental data. In a range of temperatures 283 - 390 K thermosensitive properties of SiOx -Fe- films are investigated and values of temperature coefficient of resistance is determined. These coatings can be used as a sensitive layer of uncooled microbolometers.

Paper Details

Date Published: 14 April 2003
PDF: 5 pages
Proc. SPIE 5065, Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (14 April 2003); doi: 10.1117/12.502296
Show Author Affiliations
K. Michailovskaya, Institute of Semiconductor Physics (Ukraine)
Ivan Z. Indutnyy, Institute of Semiconductor Physics (Ukraine)
Peter E. Shepeliavy, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 5065:
Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics
Fiodor F. Sizov; Johanna V. Gumenjuk-Sichevska; Sergey A. Kostyukevych, Editor(s)

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