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Proceedings Paper

Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture
Author(s): Christophe Gorecki; Andrei Sabac; P. Bey; K. Gut; Alain Jacobelli; Thierry Dean
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Paper Abstract

While testing electrical properties in microsystems is a well-developed art, the testing of mechanical properties of MEMS devices is not. There is a great need for techniques that will permit the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer, monolithically integrated into the PZT actuated membrane.

Paper Details

Date Published: 3 October 2003
PDF: 7 pages
Proc. SPIE 5145, Microsystems Engineering: Metrology and Inspection III, (3 October 2003); doi: 10.1117/12.501463
Show Author Affiliations
Christophe Gorecki, LOPMD, Univ. de Franche-Comte, CNRS (France)
Andrei Sabac, LOPMD, Univ. de Franche-Comte, CNRS (France)
P. Bey, LOPMD, Univ. de Franche-Comte, CNRS (France)
K. Gut, LOPMD, Univ. de Franche-Comte, CNRS (France)
Alain Jacobelli, Thales Research & Technology France (France)
Thierry Dean, Thales Research & Technology France (France)


Published in SPIE Proceedings Vol. 5145:
Microsystems Engineering: Metrology and Inspection III
Christophe Gorecki, Editor(s)

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