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Proceedings Paper

Scatteroscope for testing polished surfaces
Author(s): Wieslaw Chabros
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Paper Abstract

An instrument for inspecting polished surfaces was built in the Institute of Applied Optics. The instrument called scateroscope enables measuring the rms roughness and visualization of surface defects and particles of contamination. It is especially useful for assessment high quality glass plates, mirrors and semiconductor wafers. The measured plates can be sticked on polishing wheel and can be tested during the polishing process.

Paper Details

Date Published: 1 April 2003
PDF: 8 pages
Proc. SPIE 5064, Lightmetry 2002: Metrology and Testing Techniques Using Light, (1 April 2003); doi: 10.1117/12.501409
Show Author Affiliations
Wieslaw Chabros, Institute of Applied Optics (Poland)

Published in SPIE Proceedings Vol. 5064:
Lightmetry 2002: Metrology and Testing Techniques Using Light
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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