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Proceedings Paper

Simultaneous measurement of surface topology and material distribution by polarization detection
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Paper Abstract

We describe simultaneous determination of surface height profile and material distribution in the surface by imaging polarization detection. Starting from the single-beam case, the measurement principle based on the Stokes-Mueller formalism is deduced. This algorithm implies waviness detection of smooth as well as of rough surfaces. The basic concept of an imaging ellipsometer and its system configuration are discussed in the Stokes-Mueller formalism. Measuring the local slopes of the surface applying Fresnel's equations, the height image is deduced. Furthermore the imaging ellipsometer delivers the local complex refractive index from which the image of material distribution can be derived by a look-up table.

Paper Details

Date Published: 30 May 2003
PDF: 9 pages
Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.501332
Show Author Affiliations
Seyed Mohammad Naghibi Saber, Univ. Kassel (Germany)
Werner Baetz, Univ. Kassel (Germany)
Wolfgang Holzapfel, Univ. Kassel (Germany)


Published in SPIE Proceedings Vol. 5144:
Optical Measurement Systems for Industrial Inspection III
Wolfgang Osten; Malgorzata Kujawinska; Katherine Creath, Editor(s)

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