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Proceedings Paper

Paired interferometric measurement of planarity and parallelism
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Paper Abstract

An interferometric method to test plane parallel plates both for planarity and parallelism of the end faces is reported. The method requires that the plates are reflective or temporarily metal coated. Measurements are taken by insertion of the plates in a reference cavity. The optical configuration uses a standard programmable interferometer with an external right angle prism folding back the probe beam. The prism error is determined by cavity calibration, and is subtracted at data reduction. The measuring procedure is discussed in detail, and results of a laboratory demonstration are presented.

Paper Details

Date Published: 30 May 2003
PDF: 8 pages
Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.501263
Show Author Affiliations
Maurizio Vannoni, Istituto Nazionale di Ottica Applicata (Italy)
Giuseppe Molesini, Istituto Nazionale di Ottica Applicata (Italy)

Published in SPIE Proceedings Vol. 5144:
Optical Measurement Systems for Industrial Inspection III
Wolfgang Osten; Malgorzata Kujawinska; Katherine Creath, Editor(s)

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