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Proceedings Paper

Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems
Author(s): Cristina Martin; Zachary Davis; Esko Forsen; Migdong Dong; Josep Montserrat; Gabriel Abadal; Francesc Perez-Murano; Xavier Borrise; Anja Boisen; Núria Barniol
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Paper Abstract

Nanolithography based on atomic force microscopy is a widely used techniques for the prototyping of nanostructures. This technique has attracted great attention due to its simplicity, versatility and precise control. Oxidation is performed at normal atmosphere where the meniscus connecting tip and surface plays a key role. The present study describes the electrical conductivity of this nanometer-size meniscus. By acquiring force vs distance curves, we determine the relationship between the tip-surface separation and electrical current. It is observed an increase of the electrical current at small finite separations (< 2 nm) due to a change in water meniscus properties, and a decrease of electrical current when the meniscus is elongated.

Paper Details

Date Published: 29 April 2003
PDF: 8 pages
Proc. SPIE 5118, Nanotechnology, (29 April 2003); doi: 10.1117/12.501262
Show Author Affiliations
Cristina Martin, Ctr. Nacional de Microelectronica (Spain)
Zachary Davis, Danmarks Tekniske Univ. (Denmark)
Esko Forsen, Danmarks Tekniske Univ. (Denmark)
Migdong Dong, Danmarks Tekniske Univ. (Denmark)
Josep Montserrat, Ctr. Nacional de Microelectronica (Spain)
Gabriel Abadal, Univ. Autonoma de Barcelona (Spain)
Francesc Perez-Murano, Ctr. Nacional de Microelectronica (Spain)
Univ. Autònoma de Barcelona (Spain)
Xavier Borrise, Univ. Autonoma de Barcelona (Spain)
Anja Boisen, Ctr. Nacional de Microelectrónica (Spain)
Núria Barniol, Univ. Autònoma de Barcelona (Spain)

Published in SPIE Proceedings Vol. 5118:
Robert Vajtai; Xavier Aymerich; Laszlo B. Kish; Angel Rubio, Editor(s)

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