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Proceedings Paper

Fiber optic displacement sensor for measurement of thin film thickness
Author(s): Jianhua Wang
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Paper Abstract

The design of a reflective fiber-optic displacement sensor for the measurement of the thin film thickness is discussed in this paper. On the basis of traditional reflective fiber-optic displacement sensors, a two-measurement method for measuring the thin film thickness is proposed. Because of the improvement in design, enlargement of the measuring range and enhancement of the initial displacement enable this method to become possible in practical use. This sensor has an outstanding characteristic of being free from the effect of light interference. In performance, it has reached a measuring range of 150 micrometers , nonlinearity of 0.5%, resolution of 0.1 micrometers , stability of drift < 0.5 micrometers /hr, and initial displacement of 3 mm under the condition of no linearity correction.

Paper Details

Date Published: 1 August 1991
PDF: 4 pages
Proc. SPIE 1572, International Conference on Optical Fibre Sensors in China OFS(C) '91, (1 August 1991); doi: 10.1117/12.50063
Show Author Affiliations
Jianhua Wang, Nanjing Institute of Instrument Components and Devices (China)


Published in SPIE Proceedings Vol. 1572:
International Conference on Optical Fibre Sensors in China OFS(C) '91

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