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Proceedings Paper

Vector simulations of dark beam interaction with nanoscale surface features
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Paper Abstract

In earlier publications, it was shown that scanning of surfaces by dark beams can be exploited for sub-wavelength feature analysis. In this work, we present vector simulations based in Rigorous Coupled-Wave Analysis with the purpose to estimate the expected resolution of the method, both lateral (feature size) and axial (height). The dark beam used in this study has a line singularity generated by a π-phase step positioned in a Gaussian beam. Various combinations of the illumination and detection nuFmerical apertures (from NA=0.2 to NA=0.8) and different surface features were studied. Polarization effects which become significant at high numerical apetures, were considered as an additional source of information for the analysis. In the case of a sub-wavelength feature on an ideal surface, the resolution of the method is limited only by the electronics noise. In particular, under a reasonable assumption of a 105 signal to noise ratio, it is possible to detect a 0.2 nm step.

Paper Details

Date Published: 30 May 2003
PDF: 11 pages
Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.500588
Show Author Affiliations
Alexander V. Tavrov, Univ. Stuttgart (Germany)
Norbert Kerwien, Univ. Stuttgart (Germany)
Reinhard Berger, Univ. Stuttgart (Germany)
Hans J. Tiziani, Univ. Stuttgart (Germany)
Michael Totzeck, Carl Zeiss (Germany)
Boris Spektor, Technion-Israel Institute of Technology (Israel)
Josef Shamir, Technion-Israel Institute of Technology (Israel)
Gregory Toker, Amsys, Ltd. (Israel)
Andrei Brunfeld, Amsys, Ltd. (Israel)

Published in SPIE Proceedings Vol. 5144:
Optical Measurement Systems for Industrial Inspection III
Wolfgang Osten; Malgorzata Kujawinska; Katherine Creath, Editor(s)

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