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Proceedings Paper

Intracavity beam shaping for nanoscale surface metrology
Author(s): Boris Spektor; Yurij Parkhomenko; Josef Shamir
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Paper Abstract

Interest in beams containing phase singularities (dark beams) is evolving as applications are being realized, in particular for high-resolution microscopy and measurements. While these dark beams are usually generated with the help of diffractive elements, in this paper two new approaches for the generation of dark beams within the laser cavity are proposed and investigated. Simulations demonstrate that distributions similar to dark beams can be obtained by various laser modes.

Paper Details

Date Published: 30 May 2003
PDF: 9 pages
Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.500549
Show Author Affiliations
Boris Spektor, Technion-Israel Institute of Technology (Israel)
Yurij Parkhomenko, Technion-Israel Institute of Technology (Israel)
Josef Shamir, Technion-Israel Institute of Technology (Israel)


Published in SPIE Proceedings Vol. 5144:
Optical Measurement Systems for Industrial Inspection III
Wolfgang Osten; Malgorzata Kujawinska; Katherine Creath, Editor(s)

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