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Proceedings Paper

Low-level birefringence detection system for stress measurement in semiconductors
Author(s): Haijing Peng; Sai-peng Wong; Xiang Hua Liu; Yiu Wai Lai; Ho-pui Ho; Shounan Zhao
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Paper Abstract

In this paper, the authors present a new low-level birefringence detection (LLBD) system using photoelastic modulation technology. The LLBD system, operating at wavelength 1152 nm, determines point-by-point the magnitude and orientation (angle of fast axis) of birefringence therefore stress states in the sample. The principle of this LLBD system was described and experimentally verified. The resultant instrument shows high sensitivity and good repeatability for measurement. A sensitivity of magnitude of birefringence about 0.03° (or 0.096 nm at 1152 nm) was established for measurement. Several samples with different levels of birefringence were studied using LLBD system.

Paper Details

Date Published: 30 May 2003
PDF: 10 pages
Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.500420
Show Author Affiliations
Haijing Peng, Chinese Univ. of Hong Kong (Hong Kong)
Sai-peng Wong, Chinese Univ. of Hong Kong (Hong Kong)
Chinese University of Hong Kong (Hong Kong)
Xiang Hua Liu, Chinese Univ. of Hong Kong (Hong Kong)
Yiu Wai Lai, Chinese Univ. of Hong Kong (Hong Kong)
Ho-pui Ho, Chinese Univ. of Hong Kong (Hong Kong)
Shounan Zhao, South China Univ. of Technology (China)


Published in SPIE Proceedings Vol. 5144:
Optical Measurement Systems for Industrial Inspection III
Wolfgang Osten; Malgorzata Kujawinska; Katherine Creath, Editor(s)

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