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Proceedings Paper

MEMS optical switch control and integrated packaging
Author(s): Hong Cai; Chong Wei Chan; Yixin Wang; Chao Lu; Anand Krishna Asundi; Ai Qun Liu
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Paper Abstract

A digital control system implemented to operate the Microelectromechanical system (MEMS) optical switch is described. This MEMS switch is based on a voltage-controlled moving-mirror structure to control the optical path connections and optical power levels. The tiny MEMS devices may replace bulk optical-mechanical devices in lightwave equipment, and enable new functions not available from conventional devises. Here, by use of the proportional integral (PI) control system, each switch module functions either as a reflective optical switch or a variable attenuator. Moreover, this control system promises to improve the performance of the device, as well as make possible the monolithic integration packaging of MEMS with driving, controlling and signal processing electronics. One more attraction of this control system is its programmability. The rest of the paper describes the control system and experimental results for this MEMS optical switch.

Paper Details

Date Published: 3 October 2003
PDF: 7 pages
Proc. SPIE 5145, Microsystems Engineering: Metrology and Inspection III, (3 October 2003); doi: 10.1117/12.500339
Show Author Affiliations
Hong Cai, Institute for Infocomm Research (Singapore)
Chong Wei Chan, Nanyang Technological Univ. (Singapore)
Yixin Wang, Institute for Infocomm Research (Singapore)
Chao Lu, Institute for Infocomm Research (Singapore)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 5145:
Microsystems Engineering: Metrology and Inspection III
Christophe Gorecki, Editor(s)

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