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Proceedings Paper

Testing optical surfaces by high-precision diffractive null lenses with integrated reference surface
Author(s): Alexander G. Poleshchuk; Vadim Cherkashin; Jean-Michel Asfour
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Paper Abstract

Fizeau interferometers with an additional diffractive optical element are frequently used for measuring spherical and aspherical surfaces. We present a new design, were the Fizeau principle is now perfectly fulfilled, by generating reference and measuring wavefront on the last optical surface, carrying a diffractive optical element. Several advantages of this design are discussed and proved experimentally.

Paper Details

Date Published: 3 October 2003
PDF: 7 pages
Proc. SPIE 5145, Microsystems Engineering: Metrology and Inspection III, (3 October 2003); doi: 10.1117/12.500295
Show Author Affiliations
Alexander G. Poleshchuk, Institute of Automation and Electrometry (Russia)
Vadim Cherkashin, Institute of Automation and Electrometry (Russia)
Jean-Michel Asfour, DIOPTIC GmbH (Germany)

Published in SPIE Proceedings Vol. 5145:
Microsystems Engineering: Metrology and Inspection III
Christophe Gorecki, Editor(s)

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