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Proceedings Paper

Application of grazing incidence interferometer to rough surface measurement
Author(s): Sen Han; Erik Novak; Joseph Sullivan
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Paper Abstract

In practical grazing incidence measurements using a commercial interferometer, repeatability and accuracy suffer from several effects related to part placement. In this paper, the authors analyzed three primary error resources in grazing incidence interferometry: incidence angle error, rotation angle error and included angle. The mathematical foundations of these errors as well as measurement results of several samples are presented showing the effects of each of these errors on. Using the test procedures described in the paper, the errors can be greatly reduced and the repeatability and accuracy increased by 20%.

Paper Details

Date Published: 30 May 2003
PDF: 10 pages
Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.500108
Show Author Affiliations
Sen Han, Veeco Instruments Inc. (United States)
Erik Novak, Veeco Instruments Inc. (United States)
Joseph Sullivan, Veeco Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 5144:
Optical Measurement Systems for Industrial Inspection III
Wolfgang Osten; Malgorzata Kujawinska; Katherine Creath, Editor(s)

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