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Proceedings Paper

Crystalization of sol-gel-derived precursor zinc oxide film during KrF excimer laser irradiation
Author(s): Kazuyuki Hayashi; Toshihiko Ooie; Toshimi Nagase; Tatsuya Shinozaki; Takao Araki
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Paper Abstract

The present paper describes a study on the crystallization of a sol-gel derived precursor ZnO film during and after the irradiation of an excimer laser. The temporal change of the structure of ZnO films was discussed based on the time-resolved signal of a reflected and a transmitted laser beam during the excimer laser irradiation. The surface morphology of the films was analyzed by atomic force microscope (AFM). The pulse-to-pulse changes of integrated signals reflected the surface conditions of the ZnO film. In time-resolved measurement, significant changes of both signals were observed during the first pulse.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.499712
Show Author Affiliations
Kazuyuki Hayashi, Ehime Univ. (Japan)
Toshihiko Ooie, National Institute of Advanced Industrial Science and Technology (Japan)
Toshimi Nagase, National Institute of Advanced Industrial Science and Technology (Japan)
Tatsuya Shinozaki, National Institute of Advanced Industrial Science and Technology (Japan)
Takao Araki, Ehime Univ. (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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