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Proceedings Paper

Diamond-like carbon films by pulsed-laser deposition with additional laser irradiation to plume
Author(s): Tatsuya Shinozaki; Zhi Ying Chen; Toshihiko Ooie; Tetsuo Yano
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Paper Abstract

A novel technique for synthesizing a diamond-like carbon (DLC) film by pulsed laser deposition (PLD) is proposed. In the technique, additional lasers irradiated the plume in order to increase the density of the ionic carbon. By irradiating with an ArF excimer laser, the emission intensity of the atomic carbon was increased greatly. By irradiating with the third harmonic output and the fundamental output of an Nd:YAG laser, the emission intensity of the atomic and ionic carbon also increased greatly. The sp3 content increased from 51% without to 76% with two additional irradiation of the fundamental output of two Nd:YAG laser beams. The differences in the binding energy and surface morphology between the films with and without the irradiation of the additional lasers to the plume were observed by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM), respectively.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.499709
Show Author Affiliations
Tatsuya Shinozaki, National Institute of Advanced Industrial Science and Technology (Japan)
Zhi Ying Chen, National Institute of Advanced Industrial Science and Technology (Japan)
Toshihiko Ooie, National Institute of Advanced Industrial Science and Technology (Japan)
Tetsuo Yano, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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