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Proceedings Paper

Monolithic III-V and hybrid polysilicon-III-V microelectromechanical tunable multilayer filters and vertical-cavity surface-emitting lasers
Author(s): Edward M Ochoa; James A Lott; Thomas R. Nelson; M. C. Harvey; J. A. Raley; Andreas Stintz; Kevin J Malloy
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Paper Abstract

We report our progress on the design and fabrication of electrostatically-actuated microelectromechanical (MEM) tunable wavelength filters and vertical cavity surface-emitting lasers (VCSELs). We investigate both an all-semiconductor monolithic approach and a hybrid approach based on the combination of conventional polysilicon microelectromechanical systems (MEMS) and III-V semiconductor thin-film distributed Bragg reflector (DBR) and VCSEL structures. In the tunable hybrid structures the III-V semiconductor layers are flip-bonded onto specially designed polysilicon foundry MEMS structures and separated from their lattice-matched parent substrates by a novel post-bonding lift-off process.

Paper Details

Date Published: 24 April 2003
PDF: 8 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.499674
Show Author Affiliations
Edward M Ochoa, Air Force Institute of Technology (United States)
James A Lott, Air Force Institute of Technology (United States)
Thomas R. Nelson, Air Force Research Lab. (United States)
M. C. Harvey, Air Force Research Lab. (United States)
J. A. Raley, Air Force Institute of Technology (United States)
Andreas Stintz, Univ. of New Mexico (United States)
Kevin J Malloy, Univ. of New Mexico (United States)


Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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