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Proceedings Paper

Strategy towards fusion of nano and micro systems
Author(s): Isao Shimoyama
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Paper Abstract

This report describes the strategy after the Micromachine Research and Development project. The proposal was made in a committee meeting primary attended by members of the Micromachine Center that was held last fiscal year. It is concluded that the combination of NANOstructures on MICROsystems (NANO-ON-MICRO) plays a very important role for nanotechnology as well as conventional manufacturing technology. To promote this strategic approach, the action taken immediately is mentioned as three in one: infrastructure, consulting service and grant for innovative ideas. The innovative ideas are surely appearing from the promising area of manufacturing, e.g. multimaterial MEMS/NEMS, 3D MEMS/NEMS, micro/nanomanipulation, and design/simulation.

Paper Details

Date Published: 13 November 2002
PDF: 10 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.499601
Show Author Affiliations
Isao Shimoyama, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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