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Proceedings Paper

Compact electron-based EUV and ultrashort hard x-ray sources
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Paper Abstract

A review of our progress in the realization of an ultrashort-pulse laser-driven hard-x-ray source based on the combination of a femtosecond laser system with an x-ray diode is given. New results on the development of electron-based compact EUV sources for "at-wavelength" metrology are presented. Detailed investigations of spectral, spatial, and temporal characteristics of both sources are performed and possible applications are discussed.

Paper Details

Date Published: 7 January 2004
PDF: 12 pages
Proc. SPIE 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, (7 January 2004); doi: 10.1117/12.499589
Show Author Affiliations
Andre Egbert, Laser Zentrum Hannover e.V. (Germany)
Boris N. Chichkov, Laser Zentrum Hannover e.V. (Germany)


Published in SPIE Proceedings Vol. 5196:
Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications
George A. Kyrala; Jean-Claude J. Gauthier; Carolyn A. MacDonald; Ali M. Khounsary, Editor(s)

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