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Proceedings Paper

Novel three-axis silicon probe with integrated circuit on chip for microsystem components
Author(s): Vladimir Nesterov; Petcharin Pornnoppadol; Uwe Brand; Ralph Wilke; M. Schmidt; Stephanus Buettgenbach
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Paper Abstract

A three-axis micro probe with wiring of the piezoresistors to Wheatstone bridges on the silicon membrane was currently developed for application in high precision coordinate measuring machines (CMM). The methods and results of the experimental investigation of the main properties of the 3d micro probe are presented. The influence of temperature and light onto the probe performance is described. Finally a brief outlook on the optimization of the threshold sensitivity is given.

Paper Details

Date Published: 24 April 2003
PDF: 6 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.499264
Show Author Affiliations
Vladimir Nesterov, Physikalisch-Technische Bundesanstalt (Germany)
Petcharin Pornnoppadol, Physikalisch-Technische Bundesanstalt (Germany)
Uwe Brand, Physikalisch-Technische Bundesanstalt (Germany)
Ralph Wilke, Technische Univ. Braunschweig (Germany)
M. Schmidt, Technische Univ. Braunschweig (Germany)
Stephanus Buettgenbach, Technische Univ. Braunschweig (Germany)


Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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