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Proceedings Paper

New challenges in Rutherford backscattering spectrometric (RBS) analysis of nanostructured thin films
Author(s): Aliz Simon; Zoltan Kantor
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Paper Abstract

When determining exact quantitative elemental composition of thin films, the ultimate solution is often an application of ion beam analytical techniques, mostly Rutherford Backscattering Spectrometry (RBS). This technique is usually treated to be insensitive for the density of the layers, however, in some cases it became obvious that surface roughness, voids and precipitates may affect the shape of the spectral signature of a particular chemical element. In order to use RBS efficiently for nanostructured thin films, it is essential to know how the given surface topography (or above parameters) influences the relevance of the measurements. In this paper we present our contributions to the topic: the outline of a new simulation of RBS spectra of rough and nanostructured thin layers; and a brief discussion how the character and parameters of the geometrical structure (shapes, filling factors, etc.) can affect the interpretation of the measured data.

Paper Details

Date Published: 29 April 2003
PDF: 10 pages
Proc. SPIE 5118, Nanotechnology, (29 April 2003); doi: 10.1117/12.499233
Show Author Affiliations
Aliz Simon, Institute of Nuclear Research (Hungary)
Zoltan Kantor, Univ. of Szeged (Hungary)

Published in SPIE Proceedings Vol. 5118:
Robert Vajtai; Xavier Aymerich; Laszlo B. Kish; Angel Rubio, Editor(s)

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