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Proceedings Paper

Scanning force microscopic investigations of the femtosecond pulse laser ablation of indium phosphide in air
Author(s): Jorn Bonse; Martin Munz; Heinz Sturm
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Paper Abstract

Laser ablation of single-crystalline indium phosphide (InP) was performed in air by means of linearly polarized Ti:sapphire femtosecond-pulses (800 nm, 130 fs, 10 Hz). As a result of the first laser pulses, several morphological changes (crater formation, rim formation, ripple structures and cones) were observed. These effects were explored using force modulation microscopy (FMM), a technique based on scanning force microscopy (SFM), allowing the simultaneous imaging of both topography and local stiffness at a high lateral resolution. The first laser pulse induces the formation of a protruding rim (height <20 nm, width ~300 nm) bordering the ablated crater. A Fourier-analysis of the multi-pulse generated topographies reveals the formation of wavelength-sized periodic ripples (modulation depth <100 nm) with an orientation perpendicular to that of the electric field vector of the laser radiation. Besides these morphological alterations, also material modifications were observed in the irradiated regions by means of the FFM technique. Within the ablated craters, local stiffness variations were found revealing an inhomogeneous material composition/structure as a consequence of the femtosecond pulse laser treatment.

Paper Details

Date Published: 29 April 2003
PDF: 14 pages
Proc. SPIE 5118, Nanotechnology, (29 April 2003); doi: 10.1117/12.499050
Show Author Affiliations
Jorn Bonse, Instituto de Optica, CSIC (Spain)
Martin Munz, Bundesanstalt fur Materialforschung und -prufung (Germany)
Heinz Sturm, Bundesanstalt fur Materialforschung und -prufung (Germany)

Published in SPIE Proceedings Vol. 5118:
Robert Vajtai; Xavier Aymerich; Laszlo B. Kish; Angel Rubio, Editor(s)

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