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Proceedings Paper

Infrared wavelength-selective micromachined microbolometers
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Paper Abstract

Numerical simulation of the affect of a micromachined tunable Fabry-Perot cavity on the performance of microbolometer is conducted. In particular, the ability of such a tuning structure to allow the determination of effective temperature of an object is studied. Assuming incoming infrared radiation from a blackbody source has a certain distribution of wavelengths for a specific temperature, and scanning over different Fabry-Perot gaps while using a total power detector such as a microbolometer, it is possible to predict the original blackbody spectrum. Comparing the original blackbody spectrum with the predicted spectrum, the optimum interval over which the gaps must be scanned can be determined.

Paper Details

Date Published: 24 April 2003
PDF: 9 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.499017
Show Author Affiliations
Jun Wan Kim, Univ. of Texas at Austin (United States)
Dean Neikirk, Univ. of Texas at Austin (United States)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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