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Proceedings Paper

Semiconductor gas sensor compatibility with CMOS technologies
Author(s): Maria Jesus Lopez-Bosque; Jose Antonio Plaza; Joaquin Santander; Isabel Gracia; Carles Cane; Juergen Wollenstein; Emmanuel Moretton; Armin Lambrecht; Kari Schjolberg-Henriksen
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Paper Abstract

This paper describes the development of a technological process that allows the integration of gas sensors and thin film CMOS circuitry. The main technological points for the integration of gas sensors in a standard CMOS process and the effects on the full process will be described. A set of preliminary tests have been done prior to the definition of a CMOS compatible process for µ-structures and a complete test of sensitive materials are presented in order to determine the materials with most appropriate annealing temperatures for CMOS compatibility. Results show that gas sensors can be integrated with their circuitry, although require of special materials and non-CMOS standard processing as post-processing sequences.

Paper Details

Date Published: 24 April 2003
PDF: 12 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.499016
Show Author Affiliations
Maria Jesus Lopez-Bosque, Ctr. Nacional de Microelectronica (Spain)
Jose Antonio Plaza, Ctr. Nacional de Microelectronica (Spain)
Joaquin Santander, Ctr. Nacional de Microelectronica (Spain)
Isabel Gracia, Ctr. Nacional de Microelectronica (Spain)
Carles Cane, Ctr. Nacional de Microelectronica (Spain)
Juergen Wollenstein, Fraunhofer-Institut fur Physikalische Mebtechnik (Germany)
Emmanuel Moretton, Fraunhofer-Institut fur Physikalische Mebtechnik (Germany)
Armin Lambrecht, Fraunhofer-Institut fur Physikalische Mebtechnik (Germany)
Kari Schjolberg-Henriksen, Univ. of Oslo (Norway)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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