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Proceedings Paper

Compatibility of gas and flow sensor technology fabrication
Author(s): Neus Sabate; Isabel Gracia; Carles Cane; Jordi Puigcorbe; Judith Cerda; Joan Ramon Morante; Javier Berganzo
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Paper Abstract

The requirements of flow measurement and control in the home-appliances field lead to the need of a measurement system able to monitor the flow and the quality of gas. The integration of a set of sensors with different functionalities on a single chip arises as an advantageous solution. In this paper, the description of the structures and technologies required for the gas, flow and temperature sensor devices is presented prior to the complete description of the process flow for the full on-chip compatibilization. In this sense, semiconductor gas sensors and thermal flow sensors have arisen as the best candidates to address the compatibilization.

Paper Details

Date Published: 24 April 2003
PDF: 8 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498995
Show Author Affiliations
Neus Sabate, Ctr. Nacional de Microelectronica (Spain)
Isabel Gracia, Ctr. Nacional de Microelectronica (Spain)
Carles Cane, Ctr. Nacional de Microelectronica (Spain)
Jordi Puigcorbe, Univ. de Barcelona (Spain)
Judith Cerda, Univ. de Barcelona (Spain)
Joan Ramon Morante, Univ. de Barcelona (Spain)
Javier Berganzo, IKERLAN (Spain)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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