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Proceedings Paper

Fabrication of a highly efficient optical modulator based on silicon-on-insulator
Author(s): Raghied M. H. Atta; Graham J. Ensell; Alan G. R. Evans; Jason C. E. Png; Graham T. Reed
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Paper Abstract

Silicon-on-insulator (SOI) technology offers tremendous potential for the integration of optoelectronic functions on a silicon substrate. In this research, we report on the fabrication process of a Mach-Zehnder interferometer on an SOI with 0.5μm wide waveguides in a Si layer of the order of ~1μm thick. These small dimensions increase the speed of these devices. However, with these small dimensions several fabrication difficulties such as alignment and thickness accuracy are present.

Paper Details

Date Published: 24 April 2003
PDF: 7 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498967
Show Author Affiliations
Raghied M. H. Atta, Univ. of Southampton (United Kingdom)
Graham J. Ensell, Univ. of Southampton (United Kingdom)
Alan G. R. Evans, Univ. of Southampton (United Kingdom)
Jason C. E. Png, Univ. of Surrey (United Kingdom)
Graham T. Reed, Univ. of Surrey (United Kingdom)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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