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Proceedings Paper

Systematic design methodology of bistable compliant micromechanisms
Author(s): Jinni Tsay; Cheng-Kuo Sung; Liang-Qing Su
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Paper Abstract

A bistable compliant micro-mechanism possesses the distinguish characteristics of both the bistable mechanism and the compliant one. It can be suitably employed in various MEMS devices, such as a micro-relay, an impact sensor, etc. Currently, preventing fracture and enhancing reliability are the most important issues in the application of bistable compliant micro-mechanisms. Through a systematic design methodology, including tuning the parameters of geometric shapes, adding a stopper at the proper position, etc., one can obtain a more appropriate micro-mechanism for designated applications. This paper proposes a systematic methodology for the design of bistable compliant micro-mechanisms.

Paper Details

Date Published: 24 April 2003
PDF: 10 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498874
Show Author Affiliations
Jinni Tsay, National Tsing Hua Univ. (Taiwan)
Cheng-Kuo Sung, National Tsing Hua Univ. (Taiwan)
Liang-Qing Su, National Tsing Hua Univ. (Taiwan)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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