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Proceedings Paper

A four-bit digital MEMS phase shifter
Author(s): Jian Zhu; Bailing Zhou; Jinting Lin; Yuanwei Yu; Le Lu
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Paper Abstract

A 4-bit digital MEMS phase shifter, based on RF MEMS series switches and switched-line design, is presented. The phase shifter is fabricated on a 360 μm-thick silicon substrate, and the chip size is smaller than 5×8 mm 2. The simulation performance of 16 phase states shows that at X-band the worst insertion phase deviation is 8 degree from the desired value, the insertion loss is less than -2.0dB and the VSWR is less than 1.8.

Paper Details

Date Published: 24 April 2003
PDF: 6 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498844
Show Author Affiliations
Jian Zhu, Southeast Univ. (China)
Nanjing Electronic Devices Institute (China)
Bailing Zhou, Southeast Univ. (China)
Jinting Lin, Nanjing Electronic Devices Institute (China)
Yuanwei Yu, Nanjing Electronic Devices Institute (China)
Le Lu, Nanjing Electronic Devices Institute (China)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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