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Proceedings Paper

Dynamic characterization of SiO2-Au microcantilevers using Michelson interferometer
Author(s): Guillaume Marinier; Stefan Dilhaire; Luis David Patino Lopez; Mohamed Benzohra
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Paper Abstract

A method of characterization without contact of passive microstructures is presented in this paper. Samples of different SiO2-Au microcantilevers (lengths from 100μm to 300μm, width 40μm, thickness 1.1μm) were studied by means of a Michelson interferometer. Two measurement techniques were employed, one by impulse response and the other by synchronous detection, in order to obtain the microcantilevers Eigen resonant spectrum and thus to determine their first three resonant frequencies. The knowledge of these frequencies makes possible the determination of the Young’s modulus of material and thus simplifies the modeling of the microsystem.

Paper Details

Date Published: 24 April 2003
PDF: 8 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498827
Show Author Affiliations
Guillaume Marinier, Univ. de Rouen (France)
Stefan Dilhaire, Univ. Bordeaux I (France)
Luis David Patino Lopez, Univ. Bordeaux I (France)
Mohamed Benzohra, Univ. de Rouen (France)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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