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Proceedings Paper

Nanometer-scale analysis of current limited stresses impact on SiO2 gate oxide reliability using C-AFM
Author(s): Marc Porti; Montserrat Nafria; Xavier Aymerich
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Paper Abstract

The effect of current limited stresses (CLS) on the breakdown (BD) SiO2 gate oxides has been analyzed at a nanometric scale with a Conductive Atomic Force Microscope (C-AFM). Bare oxide regions have been stresed and broken down using the tip of the C-AFM as the metal electrode of a metal-oxide-semiconductor (MOS) structure. Afterwards, post-BD I-V characteristics and topographical and current images of the affected areas have been obtained to analyze the post-BD conduction, the structural damage induced in the oxide and the BD propagation. The results shwo that BD phenomenon, although triggered at one point, is electrically propagated to neighbor regions. Moreover, the area affected by BD, the structural damage and the post-BD conduction depend on the breakdown hardness. In particular, it is shown that these magnitudes are smaller when the current through the structure is limited during BD transient.

Paper Details

Date Published: 29 April 2003
PDF: 8 pages
Proc. SPIE 5118, Nanotechnology, (29 April 2003); doi: 10.1117/12.498778
Show Author Affiliations
Marc Porti, Univ. Autonoma de Barcelona (Spain)
Montserrat Nafria, Univ. Autonoma de Barcelona (Spain)
Xavier Aymerich, Univ. Autonoma de Barcelona (Spain)


Published in SPIE Proceedings Vol. 5118:
Nanotechnology
Robert Vajtai; Xavier Aymerich; Laszlo B. Kish; Angel Rubio, Editor(s)

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