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Proceedings Paper

Noncontact three-dimensional surface profiling using reflected-light holographic confocal microscopy
Author(s): Irena Antosova; Zdenek Harna
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Paper Abstract

This article deals with an application of the broad-source image plane holography, which offers nonscanning confocal imaging, i.e., real time imaging. We have developed a laboratory version of a holographic confocal microscope (HCM). By the measurement of the axial intensity response for a perfect plane mirror we have verified the confocal imaging capability with the depth discrimination. The noncontact surface profiling possibility was verified by processing series of optical sections with consequent 3D reconstruction of the real surface profile.

Paper Details

Date Published: 8 July 2003
PDF: 6 pages
Proc. SPIE 5036, Photonics, Devices, and Systems II, (8 July 2003); doi: 10.1117/12.498523
Show Author Affiliations
Irena Antosova, Brno Univ. of Technology (Czech Republic)
Zdenek Harna, Brno Univ. of Technology (Czech Republic)

Published in SPIE Proceedings Vol. 5036:
Photonics, Devices, and Systems II
Miroslav Hrabovsky; Dagmar Senderakova; Pavel Tomanek, Editor(s)

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