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Proceedings Paper

Fabrication of a three-dimensional inductor coil using excimer laser micromachining
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Date Published:
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, ; doi: 10.1117/12.498477
Show Author Affiliations
Karlo Ivan Jolic, Swinburne Univ. of Technology (Australia)
Murali K. Ghantasala, Swinburne Univ. of Technology (Australia)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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