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Proceedings Paper

Low-temperature sputter deposition of indium tin oxide anode for inverted organic diodes
Author(s): David Vaufrey; Mohamed Ben Khalifa; Jacques Tardy
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Paper Abstract

This paper reports on Organic Light Emitting Diodes (OLED) the structure of which has been inverted in order to have a light emission through the top electrode instead of through the substrate. This technology is of prime importance for high resolution active matrix displays and microdisplays as well. The key point of such a procedure is the deposition of the Indium Tin Oxide (ITO) transparent top anode. This was carried out onto the organic films structure by RF sputtering under soft enough conditions so as to avoid as much as possible any deterioration of the underlying organic layers (room temperature deposition, low plasma power density and minimal bombardment effect). The electrical and optical properties of ITO as a function of the deposition conditions are first described. Hall effect measurements show that ITO films can be grown at room temperature with a high mobility (40 cm2/V.s) and a carrier density exceeding 5 1020 cm-3. The surface roughness as a function of the plasma conditions was determined by the AFM and can be as low as 12 Angstrom. The non invasiveness of the proposed ITO deposition conditions on organic layers was assessed by measuring the photoluminescence (PL) degradation of (8-(hydroquinoline) Aluminum (Alq3). It was shown that under optimized deposition conditions, no appreciable PL degradation of the organic layers was observed. At last hole only Silicon/Al/Poly(N-vinylcarbazole)(PVK)/Poly(3,4)ethylenedioxythiophene / Polystyrenesulphonate (PEDT/PSS). ITO diodes and Silicon/Al/Alq3/NPB/CuPc/ITO diodes were processed, characterized and compared to standard “through the substrate” emitting diodes.

Paper Details

Date Published: 8 July 2003
PDF: 6 pages
Proc. SPIE 5036, Photonics, Devices, and Systems II, (8 July 2003); doi: 10.1117/12.498455
Show Author Affiliations
David Vaufrey, Ecole Centrale de Lyon (France)
Mohamed Ben Khalifa, Ecole Centrale de Lyon (France)
Jacques Tardy, Ecole Centrale de Lyon (France)


Published in SPIE Proceedings Vol. 5036:
Photonics, Devices, and Systems II
Miroslav Hrabovsky; Dagmar Senderakova; Pavel Tomanek, Editor(s)

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