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Proceedings Paper

Interferometry in the optics research group: an overview
Author(s): Hedser H. van Brug
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Paper Abstract

An overview of the research in the field of interferometry as conducted within the Optics Research Group will be presented. The first interferometer that will be presented made use of sequential phase stepping, where later setups employed simultaneous recording of the required phase steps to calculate the phase distribution. The use of temporal phase unwrapping, and the benefits obtained by it, will be discussed. The latest developments will be indicated: fiber based interferometer with an accuracy goal of 0.1 nm and a single camera speckle shearing interferometer for defect detection and deformation analysis.

Paper Details

Date Published: 7 March 2006
PDF: 12 pages
Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); doi: 10.1117/12.498441
Show Author Affiliations
Hedser H. van Brug, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 4101:
Laser Interferometry X: Techniques and Analysis
Gordon M. Brown; Malgorzata Kujawinska; Werner P. O. Jueptner; Ryszard J. Pryputniewicz; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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