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Proceedings Paper

AFM scanning moire method for nanodeformation measurement
Author(s): Huimin Xie; Gin Boay Chai; Anand Krishna Asundi; Jin Yu; Yunguang Lu; Bryan Kok Ann Ngoi; Zhaowei Zhong; Satoshi Kishimoto
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Paper Abstract

In this study, the atomic force microscope( AFM) scanning moiré method is developed. The scanning lines in the AFM monitor are used as the reference grating. The reference grating interferes with the specimen grating, and forms a moiré pattern on the monitor. The formation mechanism of AFM moiré, the deformation measurement principle using this method are described in detail. The AFM scanning moiré method is used to measure the residual deformation of mica substrate after being damaged by the YAG laser, and the thermal deformation in a QFP type electronic package. The experiment results verify the feasibility of AFM scanning moire method and show its ability to measure the in-plane deformation in both micro-and nano-scales.

Paper Details

Date Published: 7 March 2006
PDF: 9 pages
Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); doi: 10.1117/12.498437
Show Author Affiliations
Huimin Xie, Nanyang Technological Univ. (Singapore)
Gin Boay Chai, Nanyang Technological Univ. (Singapore)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
Jin Yu, Nanyang Technological Univ. (Singapore)
Yunguang Lu, Nanyang Technological Univ. (Singapore)
Bryan Kok Ann Ngoi, Nanyang Technological Univ. (Singapore)
Zhaowei Zhong, Nanyang Technological Univ. (Singapore)
Satoshi Kishimoto, National Research Institute for Metals (Japan)


Published in SPIE Proceedings Vol. 4101:
Laser Interferometry X: Techniques and Analysis
Gordon M. Brown; Malgorzata Kujawinska; Werner P. O. Jueptner; Ryszard J. Pryputniewicz; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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