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Proceedings Paper

Estimation of inside stress of microcantilever: investigation of measuring principle using macro-model
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Paper Abstract

A measurement system constructed with a micro Fizeau interferometer and the spatial fringe analysis method is proposed to measure precisely a deflection of microstructures. The results of the deflection are given as the boundary condition of a FEM. A stress in the element is analyzed by the FEM. To confirm the validity of the principle, the experiment is performed with a macro model. The measuring optical system for the macro model is constructed with a projection moire system. Without any contacts, the stress map in the element can be estimated by this method. Comparing the result from this method with the result by strain gauges, it confirms that the accuracy of the estimation of the stress is less than 5 MPa in the macro model. On basis of results in the macro model, a stress in a micro cantilever can also be estimated.

Paper Details

Date Published: 7 March 2006
PDF: 8 pages
Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); doi: 10.1117/12.498436
Show Author Affiliations
Yasuhiko Arai, Kansai Univ. (Japan)
Shunsuke Yokozeki, Kyushu Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 4101:
Laser Interferometry X: Techniques and Analysis
Gordon M. Brown; Malgorzata Kujawinska; Werner P. O. Jueptner; Ryszard J. Pryputniewicz; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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