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Proceedings Paper

Digital microholointerferometry for microstructure studies
Author(s): Lei Xu; Xiaoyuan Peng; Jianmin Miao; Anand Krishna Asundi
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Paper Abstract

Digital micro-holo-interferometry is proposed in this paper for microstructure measurements. It is developed based on the in-line digital holography incorporated with long distance microscope. The system structure is theoretically explained with wavefront diffraction analysis. The compatibility of the long distance microscope with the specific requirements in micromeasurement is discussed. And the properties of the in-line configuration in improving system performance are studied. Theoretical analysis of the system is demonstrated by the experiments on a silicon microbeam for deformation determination.

Paper Details

Date Published: 7 March 2006
PDF: 6 pages
Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); doi: 10.1117/12.498417
Show Author Affiliations
Lei Xu, Nanyang Technological Univ. (Singapore)
Xiaoyuan Peng, Nanyang Technological Univ. (Singapore)
Jianmin Miao, Nanyang Technological Univ. (Singapore)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 4101:
Laser Interferometry X: Techniques and Analysis
Gordon M. Brown; Malgorzata Kujawinska; Werner P. O. Jueptner; Ryszard J. Pryputniewicz; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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