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Proceedings Paper

Effective error reduction method in phase-shifting interferometer
Author(s): Yingjie Yu; Chunlong Wei; Mingyi Chen; Hongwei Guo
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Paper Abstract

In phase-shifting interferometer, software processing method is a very important means to achieve high accuracy. By analyzing and simulating, it is indicated that only removing the effect of the error which has a spatial frequency of twice the fringe frequency in the result is not enough, especially in high accuracy measuring. The paper presents an averaging method to reduce the effect of errors. Testing results testify this averaging method is effective and robust.

Paper Details

Date Published: 7 March 2006
PDF: 8 pages
Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); doi: 10.1117/12.498409
Show Author Affiliations
Yingjie Yu, Shanghai Univ. (China)
Chunlong Wei, Shanghai Univ. (China)
Mingyi Chen, Shanghai Univ. (China)
Hongwei Guo, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 4101:
Laser Interferometry X: Techniques and Analysis
Gordon M. Brown; Werner P. O. Jueptner; Ryszard J. Pryputniewicz; Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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