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Proceedings Paper

Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding
Author(s): Guoqiang Li; Pang Chen Sun; Yeshaiahu Fainman; Paul C. Lin
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Paper Abstract

An interference microscope based on a wavelength-to-depth encoding technique is presented. The wavelength-to-depth encoding is realized by using a diffractive lens and wavelength tuning. The coherence degree of the interference fields versus wavelength is analyzed. A depth discrimination of 0.71µm is obtained with 0.90 NA objective lenses. Experimental results of a four-level grating measurement are presented with results are comparable to those obtained with a Dektak profilometer and the same interference microscope using mechanical depth-scanning. The system is promising for fast, noncontact, high- resolution three-dimensional imaging.

Paper Details

Date Published: 7 March 2006
PDF: 10 pages
Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); doi: 10.1117/12.498380
Show Author Affiliations
Guoqiang Li, Univ. of California/San Diego (United States)
Pang Chen Sun, Univ. of California/San Diego (United States)
Yeshaiahu Fainman, Univ. of California/San Diego (United States)
Paul C. Lin, Univ. of California/San Diego (United States)

Published in SPIE Proceedings Vol. 4101:
Laser Interferometry X: Techniques and Analysis
Gordon M. Brown; Malgorzata Kujawinska; Werner P. O. Jueptner; Ryszard J. Pryputniewicz; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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