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Proceedings Paper

Phase elements by means of a photolithographic system employing a spatial light modulator
Author(s): Ivo Aubrecht; Miroslav Miler; Jan Pala
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Paper Abstract

The system employs a spatial light modulator (SLM), between a pair of crossed polarizers, and an electronic shutter. Transmission of the SLM with the polarizers is controlled by graphical software that defines which pixels are fully transparent and which are fully opaque. While a particular binary graphics is on the SLM the electronic shutter allows light to pass for a certain time. The graphics is imaged, by an objective, onto a photoresist plate. A mercury lamp is used as a light source. The graphics changes after each exposition and the whole sequence of images determines the resultant surface-relief modulation.

Paper Details

Date Published: 8 July 2003
PDF: 4 pages
Proc. SPIE 5036, Photonics, Devices, and Systems II, (8 July 2003); doi: 10.1117/12.498247
Show Author Affiliations
Ivo Aubrecht, Institute of Radio Engineering and Electronics (Czech Republic)
Miroslav Miler, Institute of Radio Engineering and Electronics (Czech Republic)
Jan Pala, Institute of Radio Engineering and Electronics (Czech Republic)


Published in SPIE Proceedings Vol. 5036:
Photonics, Devices, and Systems II
Miroslav Hrabovsky; Dagmar Senderakova; Pavel Tomanek, Editor(s)

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