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Proceedings Paper

Fast-sampling multipixel detector for a heterodyne interferometer with angstrom precision
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Paper Abstract

Standard heterodyne interferometer can be used as phase modulation subsystem in a novel interferometer designed to measure the figure of projecting mirrors with 0.1 nm accuracy. This article discusses possible operational principles of the sensor and presents experimental results for fast sampling type sensor prototype.

Paper Details

Date Published: 8 July 2003
PDF: 6 pages
Proc. SPIE 5036, Photonics, Devices, and Systems II, (8 July 2003); doi: 10.1117/12.498238
Show Author Affiliations
Oleg Soloviev, Technische Univ. Delft (Netherlands)
Gleb V. Vdovin, Technische Univ. Delft (Netherlands)
Lukas Max Krieg, Technische Univ. Delft (Netherlands)
Davies W. de Lima Monteiro, Technische Univ. Delft (Netherlands)
Joseph J. M. Braat, Technische Univ. Delft (Netherlands)
Patrick J. French, Technische Univ. Delft (Netherlands)


Published in SPIE Proceedings Vol. 5036:
Photonics, Devices, and Systems II
Miroslav Hrabovsky; Dagmar Senderakova; Pavel Tomanek, Editor(s)

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