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Proceedings Paper

Fabrication of micromachined TiNi-based microgripper with compliant structure
Author(s): Yongqing Fu; Hejun Du
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Paper Abstract

One of the problems faced in the development of micro-gripper is that the actuation displacement or force is too small. In this study, it is aimed to solve this problem with application of shape memory and compliant mechanisms. TiNi film based micro-gripper with compliant structure was design, simulated and fabricated. Some important issues regarding to the preparation of high performance shape memory TiNi films using sputtering methods were discussed.

Paper Details

Date Published: 24 April 2003
PDF: 10 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498184
Show Author Affiliations
Yongqing Fu, Nanyang Technological Univ. (Singapore)
Singapore-MIT Alliance (Singapore)
Hejun Du, Nanyang Technological Univ. (Singapore)
Singapore-MIT Alliance (Singapore)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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