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Proceedings Paper

Particularities of IR-radiation absorbing in fine polyimide structures and microbolometer detector on their base
Author(s): A. A. Zhukov; A. E. Zdobnikov; S. N. Klemin; Victor V. Tarasov; L. A. Filatov; Yu. S. Chetverov
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Paper Abstract

The absorption of IR-radiation 200-4000 cm-1 range of 0,65-1,9 micron thick polyimide thin-films with such functional coverings as titanium, silicon nitride, aluminium was investigated. The 1,3-1,4 micron thick polyimide structure have 85% absorption of IR-radiation of 720-1250 cm-1 range. On the base of the developed polyimide thin-film technology linear micro bolometric array detectors was fabricated and investigated. Calculated value of the linear micro bolometer array detectivity is 4×107 cm Hz1/2W-1.

Paper Details

Date Published: 1 April 2003
PDF: 5 pages
Proc. SPIE 5025, Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 April 2003); doi: 10.1117/12.498042
Show Author Affiliations
A. A. Zhukov, Central Scientific Research Institute Cyclone (Russia)
A. E. Zdobnikov, Central Scientific Research Institute Cyclone (Russia)
S. N. Klemin, Central Scientific Research Institute Cyclone (Russia)
Victor V. Tarasov, Central Scientific Research Institute Cyclone (Russia)
L. A. Filatov, Central Scientific Research Institute Cyclone (Russia)
Yu. S. Chetverov, Central Scientific Research Institute Cyclone (Russia)


Published in SPIE Proceedings Vol. 5025:
Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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