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Proceedings Paper

Cylindrical polarization symmetry for nondestructive nanocharacterization
Author(s): Qiwen Zhan
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Paper Abstract

Recently there is an increasing interest in laser beams with radial symmetry in polarization. Due to the cylindrical symmetry in polarization, these beams have unique focusing properties, which may find wide applications in a variety of nanometer scale applications, including high-resolution metrology, high-density data storage, and multi-functional optical microtool. In this paper, simple method of generating cylindrically polarized beams is presented and their potential applications to nondestructive nano-characterization are discussed. A high resolution surface plasmon microscope and a surface plasmon enhanced apertureless near-field scanning optical microscope are proposed. An automatic scanning microellipsometer that uses the cylindrical symmetry to enhance the signal-to-noise-ratio in high-spatial-resolution ellipsometric measurement will also be presented.

Paper Details

Date Published: 22 July 2003
PDF: 8 pages
Proc. SPIE 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems, (22 July 2003); doi: 10.1117/12.497948
Show Author Affiliations
Qiwen Zhan, Univ. of Dayton (United States)
Univ. of Dayton Research Institute (United States)

Published in SPIE Proceedings Vol. 5045:
Testing, Reliability, and Application of Micro- and Nano-Material Systems
Norbert Meyendorf; George Y. Baaklini; Bernd Michel, Editor(s)

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