Share Email Print
cover

Proceedings Paper

Device for controlling a charged particle beam structure
Author(s): A. N. Kozlov; V. D. Smolyaninov; A. P. Eremin; Anatoly M. Filachev
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

For maintenance repeatability technological of ion processing, it is necessary to support density of ion current and distribution density of ion current by constants. For this purpose the control device of ion sources with a wide beam has been developed. In this work the device for exact reproduction structure of a beam negatively or positively charged particles, is described. Calculation mistakes of measurement currents for the given device are resulted.

Paper Details

Date Published: 1 April 2003
PDF: 4 pages
Proc. SPIE 5025, Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 April 2003); doi: 10.1117/12.497623
Show Author Affiliations
A. N. Kozlov, Research Institute for Electron and Ion Optics (Russia)
V. D. Smolyaninov, Research Institute for Electron and Ion Optics (Russia)
A. P. Eremin, Research Institute for Electron and Ion Optics (Russia)
Anatoly M. Filachev, ORION State Scientific Ctr. (Russia)


Published in SPIE Proceedings Vol. 5025:
Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

© SPIE. Terms of Use
Back to Top