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Proceedings Paper

Advanced ASIC defect control
Author(s): Chuck May; John Knoch; Roger Y. B. Young
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Paper Abstract

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Paper Details

Date Published: 15 July 2003
PDF: 12 pages
Proc. SPIE 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing, (15 July 2003); doi: 10.1117/12.497615
Show Author Affiliations
Chuck May, LSI Logic Corp. (United States)
John Knoch, LSI Logic Corp. (United States)
Roger Y. B. Young, LSI Logic Corp. (United States)


Published in SPIE Proceedings Vol. 5041:
Process and Materials Characterization and Diagnostics in IC Manufacturing
Kenneth W. Tobin; Iraj Emami, Editor(s)

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