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Proceedings Paper

Ambient effects on the laser durability of 157-nm optical coatings
Author(s): Vladimir Liberman; Mordechai Rothschild; Stephen T. Palmacci; Nikolay N. Efremow; Jan H. C. Sedlacek; Andrew Grenville
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Paper Abstract

We present results of the durability of antireflectance (AR) coatings under laser irradiation with emphasis on the interplay between coating materials and ambient. We find that introducing ppm-levels of water has a dramatic impact on the performance of certain coatings. In particular, no significant degradation of a coating was observed for up to 1MJ/cm2 dose in the presence of ~20 ppm H2O, whereas linear transmission drop of several percent was observed when irradiating a coating of similar design in <0.1 ppm H2O but under 1.5 ppm O2. Cycling water concentration on and off leads a corresponding cycling of transmission of the coatings. Adding water vapor to the ambient has a much greater benefit to coating durability than adding corresponding amounts of gas phase oxygen. In a series of experiments involving the same coating stack with different degrees of porosity of the outer layer, moisture was found to have the greatest impact on the most porous coating.

Paper Details

Date Published: 26 June 2003
PDF: 12 pages
Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); doi: 10.1117/12.497525
Show Author Affiliations
Vladimir Liberman, MIT Lincoln Lab. (United States)
Mordechai Rothschild, MIT Lincoln Lab. (United States)
Stephen T. Palmacci, MIT Lincoln Lab. (United States)
Nikolay N. Efremow, MIT Lincoln Lab. (United States)
Jan H. C. Sedlacek, MIT Lincoln Lab. (United States)
Andrew Grenville, Intel SEMATECH (United States)

Published in SPIE Proceedings Vol. 5040:
Optical Microlithography XVI
Anthony Yen, Editor(s)

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